Silicon Micromachining

RM524.00
+ RM145.99 Shipping

Silicon Micromachining

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Silicon Micromachining

RM524.00

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+ RM145.99 Shipping

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Product details

Product details

Silicon Micromachining

This Comprehensive Book Provides An Overview Of The Key Techniques In The Fabrication Of Micron-scale Structures In Silicon. It Is A Blend Of Detailed Experimental And Theoretical Material, And Will Be Of Great Interest To Graduate Students And Researchers In Electrical Engineering And Materials Science Whose Work Involves The Study Of Micro-electromechanical Systems (mems).
  • Fruugo ID: 556917054-1125150693
  • ISBN: 9780521607674
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  • STANDARD: RM145.99 - Delivery between Tue 10 November 2026–Tue 08 December 2026

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